Журнал лазеров, оптики и фотоники

Miniaturized tunable QCL light source for MID-infrared spectroscopy - Rosa A Merten - Fraunhofer IPMS

Abstract

A Merten

Broadband tuning of MIR-infrared radiation from 3 to 10 μm may be a very promising way for spectroscopic study of gaseous, liquid, or solid species or intermixtures. We report a quick broadband tunable IR-light source supported the mixture of a quantum-cascade-laser and micro-opto-electro-mechanical systems (MOEMS) with integrated diffractive grating. This idea unites the benefits of broadband sources with the benefits of coherent laser sources during a miniaturized setup. The grating is processed inline within the MOEMS production process by non-isotropic etching.